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Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite...
Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering, H. C. Barshilia, B. Deepthi, K. S. Rajam, Vacuum, 81 (2006) 479-488, doi: 10.1016/j.vacuum.2006.07.003