DEPOSITION OF TIN/CRN HARD SUPERLATTICES BY REACTIVE DC MAGNETRON SPUTTERING

Deposition of TiN/CrN hard superlattices by reactive DC magnetron sputtering

Deposition of TiN/CrN hard superlattices by reactive DC magnetron sputtering, H. C. Barshilia, K. S. Rajam, Bulletin of Materials Sciences, 26 (2003) 233-237,  doi: 10.1007/BF02707797