STRUCTURE AND PROPERTIES OF REACTIVE DC MAGNETRON SPUTTERED TIN/NBN HARD SUPERLATTICE

Structure and properties of reactive DC magnetron sputtered TiN/NbN hard superlattice

Structure and properties of reactive DC magnetron sputtered TiN/NbN hard superlattice, H. C. Barshilia, K. S. Rajam, Surface and Coatings Technology, 183 (2004) 174-183,  doi: 10.1016/j.surfcoat.2003.09.070