REACTIVE SPUTTERING OF HARD NITRIDE COATINGS USING ASYMMETRIC-BIPOLAR PULSED DC GENERATOR

Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator

Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator,H. C. Barshilia, K. S. Rajam, Surface and Coatings Technology, 201 (2006) 1827-1835,  doi: 10.1016/j.surfcoat.2006.03.012