DEPOSITION AND CHARACTERIZATION OF TIALN/SI3N4 SUPERHARD NANOCOMPOSITE...

Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite...

Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering, H. C. Barshilia, B. Deepthi, K. S. Rajam, Vacuum, 81 (2006) 479-488,  doi: 10.1016/j.vacuum.2006.07.003