THERMAL STABILITY OF TIALN/TIALON/SI3N4 TANDEM ABSORBERS PREPARED BY ...

Thermal stability of TiAlN/TiAlON/Si3N4 tandem absorbers prepared by ...

Thermal stability of TiAlN/TiAlON/Si3N4 tandem absorbers prepared by reactive direct current magnetron sputtering, H.C. Barshilia, N. Selvakumar, K. S. Rajam, Journal of Vacuum Science and Technology, 25 (2007) 383,  doi: 10.1116/1.2699425