GROWTH AND CHARACTERIZATION OF ALUMINUM NITRIDE COATINGS PREPARED BY...

Growth and characterization of aluminum nitride coatings prepared by...

Growth and characterization of aluminum nitride coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering, H. C. Barshilia, B. Deepthi, K. S. Rajam, Thin Solid Films, 516 (2008) 4168-4174, doi: 10.1016/j.tsf.2007.10.129