STRUCTURE AND PROPERTIES OF REACTIVE DIRECT CURRENT MAGNETRON SPUTTERED...

Structure and properties of reactive direct current magnetron sputtered...

Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings, H. C. Barshilia, B. Deepthi, K. S. Rajam, Kanwal Preet Bhatti, S. Chaudhary, Journal of Materials Research, 23 (2008) 1258-1268, doi:10.1557/JMR.2008.0168