DEPOSITION OF TIALN COATINGS USING REACTIVE BIPOLAR PULSED DIRECT CURRENT...

Deposition of TiAlN coatings using reactive bipolar pulsed direct current...

Deposition of TiAlN coatings using reactive bipolar pulsed direct current unbalanced magnetron sputtering, H. C. Barshilia, K. Yogesh, K. S. Rajam, Vacuum, 83 (2008) 427-434, doi:10.1016/j.vacuum.2008.04.075