DEPOSITION AND CHARACTERIZATION OF TIALSIN NANOCOMPOSITE COATINGS...

Deposition and characterization of TiAlSiN nanocomposite coatings...

Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering, H. C. Barshilia, Moumita Ghosh, Shashidhara, Raja Ramakrishna, K. S. Rajam, Applied Surface Science, 256 (2010) 6420-6426,  doi: 10.1016/j.apsusc.2010.04.028