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Superhard nanocomposite coatings of TiN/Si3N4 prepared by reactive...
Superhard nanocomposite coatings of TiN/Si3N4 prepared by reactive direct current unbalanced magnetron sputtering, H. C. Barshilia, B. Deepthi, A. S. Arun Prabhu, K. S. Rajam, Surface and Coatings Technology, 201 (2006) 329-337, doi: 10.1016/j.surfcoat.2005.11.124